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Accuray was founded in 1990 by John R. Adler, a Stanford neurosurgeon, and commenced commercial operations in 1992.
In February 2007, Accuray was registered under the ticker NASDAQ:ARAY. In 2011, Accuray completed its $277 million acquisition of TomoTherapy Inc., creator of advanced radiation therapy solutions for cancer care.
In 2012, the company acquired Morphormics for a total $5.7 million. Morphormics was founded by University of North Carolina at Chapel Hill faculty and specialized in developing imaging software.
In 2015, Accuray signed an agreement with RaySearch Laboratories AB to integrate treatment planning support for TomoTherapy, Radixact and CyberKnife.
In July 2019, Accuray joint venture with CNNC Accuray in Tianjin received the license for operating in China.
In August 2023, Accuray changed its head quarters from Sunnyvale, California USA to Madison, Wisconsin, USA.