ENTEGRIS INC

The company was incorporated in 1999 as the combined entity of Fluoroware, Inc., which began operating in 1966, and EMPAK, Inc. The company went public in 2000.

In August 2005, Entegris merged with Mykrolis Corporation, a publicly held supplier of filtration products to the semiconductor industry. Mykrolis was spun-out of Millipore Corporation in 2000.

In August 2008, Entegris acquired Poco Graphite, Inc., a Decatur, Texas supplier of specialized graphite and silicon carbide products for use in semiconductor, EDM, glass bottling, biomedical, aerospace, and alternative energy applications.

On April 30, 2014, Entegris acquired Danbury, Connecticut -based ATMI, a publicly held company providing critical materials and materials-handling solutions to the semiconductor industry, in a $1.1 billion transaction.

In December 2020, Entegris announced an investment of US$500 million, building a state-of-the-art facility in Taiwan. The project is expected to complete in three years in Kaohsiung Science Park.

In July 2022, Entegris acquired another U.S. semiconductor chemicals company, CMC Materials Inc., for $5.7 billion. The acquisition, previously known as Cabot Microelectronics Corp, had 2,200 employees.